TSP Laser Direct Patterning System
Equipment for manufacturing TSP(Touch Screen Panel) to make pattern on panel using laser of silver nanowire transparent electrode
Feature
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Process Performance
· Patterning using laser and high-speed scanner
· 1064nm pico second laser
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Productivity / Hardware
· Very simple process compared to existing patterning processes such as etching and printing
· No need for a protective film removal by enabling selective patterning
· Available in both roll to roll processing and sheet processing
· Environment-friendly process with chemical-free
· Reduced patterning time using high speed laser scanner
· Very little change in haze and transparency after Ag nanowire patterning
· Since no required mask, various patterns can be manufactured by changing program.
Specifications
Parameter | Categorization | Specification |
Roll Film Width | 500mm | |
XY Stage | X Stroke | 500mm |
Y Stroke | 500mm | |
Z Stroke | 10mm | |
Accuracy | 3um @ Full stroke | |
Velocity | 500mm/s | |
Substrate | Size | 600mm X 550mm |
Flatness | 100um | |
Film handling | Vacuum suction Blowing | |
Laser & Scanner | Laser type | 1064nm pico second laser |
Pulse duration | 50ps | |
Repetition rate | 5MHz | |
Scanner speed | 30m/s | |
Field size | 500mm x 500mm or more | |
Scanner position accuracy | 5um | |
Alignment | Camera | Area Scan Camera |
Resolution | < 1.5um | |
FOV (Field of View) | 2mm (Align mark dependent) | |
Inspection | Camera | Line Scan Camera |
Resolution | < 5um | |
FOV | 600mm | |
Speed | > 1MHz |
■ Customizable Hardware/Software UI