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TSP Laser Direct Patterning System

Equipment for manufacturing TSP(Touch Screen Panel) to make pattern on panel using laser of silver nanowire transparent electrode


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Feature
  • Process Performance

    · Patterning using laser and high-speed scanner

    · 1064nm pico second laser


  • Productivity / Hardware

    · Very simple process compared to existing patterning processes such as etching and printing

    · No need for a protective film removal by enabling selective patterning

    · Available in both roll to roll processing and sheet processing

    · Environment-friendly process with chemical-free

    · Reduced patterning time using high speed laser scanner

    · Very little change in haze and transparency after Ag nanowire patterning

    · Since no required mask, various patterns can be manufactured by changing program.


Specifications


Parameter
Categorization
Specification
Roll Film Width
500mm
XY Stage
X Stroke
500mm
Y Stroke
500mm
Z Stroke
10mm
Accuracy
3um @ Full stroke
Velocity
500mm/s
Substrate
Size
600mm X 550mm
Flatness
100um
Film handling
Vacuum suction Blowing
Laser & Scanner
Laser type
1064nm pico second laser
Pulse duration
50ps
Repetition rate
5MHz
Scanner speed
30m/s
Field size
500mm x 500mm or more
Scanner position accuracy
5um
Alignment
Camera
Area Scan Camera
Resolution
< 1.5um 
FOV (Field of View)
2mm (Align mark dependent)
Inspection
Camera
Line Scan Camera
Resolution
< 5um 
FOV
600mm
Speed
> 1MHz 


■ Customizable Hardware/Software UI