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OLED Module Warpage Measurement System

Equipment to measure warpage of OLED panel using laser sensor

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Feature
  • Process Performance

    · Panel Size: 48”~88”

    · Takt time: Max 12 seconds

    · Accuracy: ±0.1mm

  • Productivity / Hardware

    · Measure panel size using on-board sensor

    · Function to measure front and back side

    · Bi-directional measurement: Left/right direction measurement

    · Separate provide R&R (Repeatability & Reproducibility) verified jig

    · Provide various analysis programs

    · Customize Hardware / UI Software

Specifications


Axis
Specification
Remark
X

LM Guide + Linear motor + Scale
Moving Range : 2400mm

Sensor X axis measurement axis
Y1

Ball Screw + LM Guide + Servo Motor
Moving Range : 100mm

LK-H87 Laser Displacement Sensor1
Y2

Ball Screw + LM Guide + Servo Motor
Moving Range : 600mm

LK-H87 Laser Displacement Sensor2
Y3

Ball Screw + LM Guide + Servo Motor
Moving Range : 600mm

LK-H87 Laser Displacement Sensor3
S

Ball Screw + LM Guide + Servo Motor
Moving Range : 500mm

Panel size 대응 Stopper
C

Ball Screw + LM Guide + Servo Motor
Moving Range : 600mm

Panel Chucking
P1

Ball Screw + LM Guide + Servo Motor
Moving Range : 500mm

Panel Support
P2

Ball Screw + LM Guide + Servo Motor
Moving Range : 500mm

Panel Support


■ Customizable Hardware/Software UI