Process Performance

· Machine Dimension: 1330mm X 1230mm X 1700mm

· Machine Weight: Approx. 1000kg

· Electric Power: 3Ф 220V 60Hz 10kVA

· Clean Air: Over 6kg

Productivity / Hardware

· Design of measuring head composed of laser distance sensor, CCD camera and LED ring light

· Minimize tact time by application of a telecentric lens that provides a wide focal length

· Automatic door open/close system for the wafer carrier

· Application of continuous rotary table to measure in various directions

· Provide jigs for equipment inspection to check machine errors

· Customize Hardware / UI Software