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Micro CMM

Equipment for precision measurement of workpieces with complex shape

Precision measurement of subminiature parts including optical parts

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Feature
  • Process Performance

    · Application of 6 laser scales for 6 degrees of freedom measurement

    · Optimum design to realize Abbe error "0"

    · Application of plane mirror

    · Application of temperature, humidity and barometric pressure sensor to enable active compensation

  • Productivity / Hardware

    · Secure stability through symmetrical and highly rigid structure

    · Consideration of weather errors

    · Application of high precision probe and optical system

    · Flexible driving connection between driving parts and carriers

    · Both touch and optical measurement are available.

    · Customize Hardware / UI Software

Specifications


Parameter
Categorization
Specification
Type & Base
Window Type & Granite
Scale
Laser Interferometer Encoder (6ea)
Travel Length
X
300mm
Y
300mm
Z
50mm
Measuring Sensor
Touch Probe
Renishaw PH6M + TP7M
Optical Probe
CCD SONY 1/1.8 2Mega Pixel + NAVITAR Tube Lens (Object Lens)
Weight
2.5 ton
MPE

E1 (X&Y) : 0.15 um

E1 (Z) : 0.15um

E3 : 0.3um


■ Customizable Hardware/Software UI