Micro CMM
Equipment for precision measurement of workpieces with complex shape
Precision measurement of subminiature parts including optical parts
Contact SalesFeature
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Process Performance
· Application of 6 laser scales for 6 degrees of freedom measurement
· Optimum design to realize Abbe error "0"
· Application of plane mirror
· Application of temperature, humidity and barometric pressure sensor to enable active compensation
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Productivity / Hardware
· Secure stability through symmetrical and highly rigid structure
· Consideration of weather errors
· Application of high precision probe and optical system
· Flexible driving connection between driving parts and carriers
· Both touch and optical measurement are available.
· Customize Hardware / UI Software
Specifications
Parameter | Categorization | Specification |
Type & Base | Window Type & Granite | |
Scale | Laser Interferometer Encoder (6ea) | |
Travel Length | X | 300mm |
Y | 300mm | |
Z | 50mm | |
Measuring Sensor | Touch Probe | Renishaw PH6M + TP7M |
Optical Probe | CCD SONY 1/1.8 2Mega Pixel + NAVITAR Tube Lens (Object Lens) | |
Weight | 2.5 ton | |
MPE | E1 (X&Y) : 0.15 um E1 (Z) : 0.15um E3 : 0.3um |
■ Customizable Hardware/Software UI