Precision Transfer Stage
Equipment that can precisely measure changes in parts assembly and system level in order for payloads used in satellite to work properly
Feature
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Process Performance
· Moving Stroke: 2000mm
· Operating Resolution: 0.1㎛
· Accuracy: 2㎛
· Repeatability(@3σ): < 2㎛
· Max Velocity: 200mm/s
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Productivity / Hardware
· Measuring payloads using stage moving along the face of the granite plate and top sensor of stage(Theodolite)
· Granite base frame
· Pitch, Yaw, Roll : < 2”
· Customize Hardware / UI Software
Specifications
Description | Specifications | |
Axial | Horizontal | Vertical |
Moving Stroke | 2000mm | 600mm |
Operating Resolution | 0.1um | 0.1um |
Accuracy | 2um | 2um |
Repeatability | <2um | <2um |
Max Velocity | 200mm/s | 100mm/s |
Perpendicularity of travelling axes | 2" | 2" |
Angular Stability | 2" | 2" |
Scale | Zerodur Glass Ceramic | Zerodur Glass Ceramic |
Max Velocity | 200mm/s | 100mm/s |
Driving Mechanism | Harmonic Motor Rack & Pinion | Harmonic Motor Rack & Pinion |
Mass | 500kg |
■ Customizable Hardware/Software UI