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Stage

Transfer/alignment system for inspecting and measuring wafer

Contact Sales
Feature
  • Process Performance

    · Overall Dimension: 380mm X 400mm X 480mm

    · Linear Motor drive based on LM guideways

    · Application of high precision hollow bore DD motor

    · High precision rotation control


  • Productivity / Hardware

    · Precision alignment of target through precise transport

    · Application of Precision grade rotary tables

    · Application of GORE cable certified for ISO Class 1 Cleanroom

    · RAYDENT Treatment of assembly parts

    · Customize according to customer requirement specification

Specifications


Parameter
X Axis
θ-Axis 1
θ-Axis 2
Stroke
155 mm
±360°
0-180°
Payload

30N
10KG
Flatness
±2um@F.T


Straightness
±2um@F.T


Eccentricity

±1.5um
±1.5um
Tilt Error or Wobble

1 arc-sec
1 arc-sec
Resolution
≤15nm
0.2 arc-sec
0.2 arc-sec
Position Accuracy
≤±1um
±3 arc-sec
±3 arc-sec
Repeatability
≤±0.5um
±2 arc-sec
±2 arc-sec
Stability
<50nm


Speed
300mm/s
720deg/sec
360deg/sec
Acceleration
0.2G
3000deg/s2
3000deg/s2
Settling Time
≤0.5s
≤0.1s
≤0.1s

Pitch

≤10"


Roll
≤10"


Axial Error

1um
1um
Radial Error

1um
1um
Mass 
Customizable

■ Customizable Hardware/Software UI