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Rotary Table

High speed/precision index rotary system

3 Type (Air Bearing, Ball Retainer, Roller Retainer)


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Feature
  • Process Performance

    · Radial Runout: 1㎛

    · Axial Runout: 1㎛

    · Maximum Speed: *Consultation

    · Maximum Acceleration: *Consultation

    · Maximum Load: *Consultation

  • Productivity / Hardware

    · 3 Type

    - Air Bearing: Low payload, High precision

    - Ball Retainer: Middle payload, High precision

    - Roller Retainer: High payload, High precision

    · High precision rotation performance

    · Selectable hollow bore type when manufacturing with ball of roller retainer type

    · Customize according to customer requirement specification


Specifications


Parameter
X Axis
θ-Axis 1
θ-Axis 2
Stroke
15 mm
±360°
0-180°
Payload

30N
10KG
Flatness
±2um@F.T


Straightness
±2um@F.T


Eccentricity

±1.5um
±1.5um
Tilt Error or Wobble

1"
1"
Resolution
≤15nm
0.2"
0.2"
Position Accuracy
≤±1um
±3"
±3"
Repeatability
≤±0.5um
±2"
±2"
Stability
<50nm


Velocity
300mm/s
720deg/s
360deg/s
Acceleration
0.2G
3000deg/s2
3000deg/s2
Settling Time
≤0.5s
≤0.1s
≤0.1s

Pitch

≤10"


Roll
≤10"


Run-out (Axial & Radial)

1um
1um
Mass 
Customizable

■ Customizable Hardware/Software UI